Facility 2

Gas FTIR
Gas FTIR
Laser Lithography
Laser Lithography
Large Sputtering Machine
Large Sputtering Machine
TG
TG
RIE
RIE
AFM
AFM
Full Auto CVD Furnace F1
Full Auto CVD Furnace
"F1" (Explorer)
F1 Dash CVD Furnace
"F1 Dash" CVD Furnace
F3 CVD Furnace
"F3" CVD Furnace
I2 CVD Furnace
"I2" CVD Furnace
I4 CVD Furnace
"I4" CVD Furnace
I5 CVD Furnace
"I5" CVD Furnace