Facility 5

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Electron Beam Lithography
Electron Beam Lithography
Floating Catalyst CVD Synthesis System
Floating Catalyst CVD Synthesis System
Microwave CVD Synthesis System
Microwave CVD Synthesis System
FE-SEM
FE-SEM
Ion Milling System
Ion Milling System
Laser Marker
Laser Marker
Dicing Saw
Dicing Saw
ICP-RIE
ICP-RIE
 
 
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